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STN-10D30

STN-10D30 TYPE PVD COATING EQUIPMENT
Equipment:
• The STN-10FD30 type PVD Coating Equipment has been specially designed for decorative coating and functional coating,for this purpose the unit is equipped with 10 arc evaporation sources.
• The extreme high rate of ionization in arc evaporation technology provides excellent adhesion properties of the coating to the substrate surface and dense, strong layers.
• For the required golden color the system is provided with Titanium targets and Zirconium targets,also including Titanium-Nitride (TiN) and Zirconium-Nitride (ZrN) process.
• Other colors can be realized by choice of the right target material and appropriate process control.
• The advanced Controlled Arc system with controlled steering of the arc ensures a smooth and homogeneous layer.The controlled Arc-system also provides high coating uniformity and excellent target utilization efficiency.
• The process is running fully automatically by a Programmable Logic Control-unit+PC.
• Chamber, vacuum system, gas flow and controls are chosen of first class design and ensure a reliable,repeatable production with high system availability.

GENERAL SPECIFICATIONS OF STN-10FD30
Process chamber
• Vacuum Chamber Inner Size Φ1000*H1500 mm
• Stainless steel, double walled, water cooled
• One front door, water cooled front door with the same curve as the cylinder chamber in order to strengthen its rigidity.
 Two view ports on the door cooling by water
• Substrate heating, Power 18 kW effective
• Temperature control by thermo-couples

Pumping system
• One oil diffusion pump 16000 L/s
• One Roots Vacuum Pump 300L/s
• Two Rotary vane pump 70L/s & 30L/s

Cathodes Arc Ion Sources
• Number Arc: 10
• Type: Advanced Controlled Arc
• Target size: Φ100 x 40 mm
• Position: around chamber
• Power supplies: 10, DC, max.160 A

Electronic
• Arc-ignition Effective

Turntable
• Loading capacity coating zone: Φ750*H1000mm
• Max. Weight: 300kg
• Satellite axis 24 with integrated 6 rotation
• Satellite diameter:Φ350mm/Φ130mm

Control system
• Process control Fully automatic by color Programmable Logic Control (PLC) +PC

Operation Cycle time
• Less than 35 Minutes

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