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STN-500A

STN-500A TYPE PVD COATING EQUIPMENT
Equipment:
• The STN-500A type PVD Coating Equipment has been specially designed for PVD hard-coating, for this purpose the unit is equipped with 2 arc evaporation sources .
• The extreme high rate of ionization in arc evaporation technology provides excellent adhesion properties of the coating to the substrate surface and dense, strong layers.
• For the required golden color the system is provided with Titanium targets and Zirconium targets, also including Titanium-Nitride (TiN) and Zirconium-Nitride (ZrN) process.
• Other colors can be realized by choice of the right target material and appropriate process control.
• The advanced Controlled Arc system with controlled steering of the arc ensures a smooth and homogeneous layer. The controlled Arc-system also provides high coating uniformity and excellent target utilization efficiency.
• The process is running fully automatically by a Programmable Logic Control-unit.
• Chamber, vacuum system, gas flow and controls are chosen of first class design and ensure a reliable, repeatable production with high system availability.

GENERAL SPECIFICATIONS OF STN-500A
Process chamber
• Vacuum Chamber Inner Size Φ500*H500 mm
• Stainless steel, double walled, water cooled
• One front door, water cooled front door with the same curve as the cylinder chamber in order to strengthen its rigidity. Two view ports on the door cooling by water
• Substrate heating, Power 6 kW effective
• Temperature control by thermo-couples

Pumping system
• One Oil Diffusion Pump 2100 L/s
• One Rotary Vane Pump 15L/s

Cathodes Arc Ion Sources
• Number Arc: 2
• Type: Advanced Controlled Arc
• Target size: Φ100 x 40 mm
• Position: around chamber
• Power supplies: 14, DC, max.160 A

Electronic
• Arc-ignition Effective

Turntable
• Loading capacity coating zone: Φ300*H300mm
• Max. Weight: 50kg
• Satellite axis 9 with integrated 3 rotation
• Satellite diameter:Φ170mm/Φ80mm

Control system
• Process control Fully automatic by color Programmable Logic Control (PLC)

Operation Cycle time
• Less than 35 min

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